Mass Sensor Based on Thin Film Bulk Acoustic Resonator

被引：0

作者：

Wu, Biyan ^{[1
]}

机构：

[1] Zhejiang Gongshang Univ, Comp & Informat Engn Coll, Hangzhou 310015, Zhejiang, Peoples R China

来源：

PROCEEDINGS OF THE 2009 2ND INTERNATIONAL CONFERENCE ON BIOMEDICAL ENGINEERING AND INFORMATICS, VOLS 1-4 | 2009年

关键词：

FBAR; mass Sensor;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FEAR sensor is applied as humidity sensor. The reproducibility of this sensor' SII and Q factor are evaluated.

引用

页码：1018 / 1021

页数：4

共 6 条

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