Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source

被引：0

作者：

Bussmann, J. ^{[1
,2
]}

Odstrcil, M. ^{[1
,3
]}

Bresenitz, R. ^{[1
,2
]}

Rudolf, D. ^{[1
,2
]}

Miao, J. ^{[4
,5
]}

Brocklesby, W. S. ^{[3
]}

Juschkin, L. ^{[1
,2
]}

机构：

[1] Rhein Westfal TH Aachen, Expt Phys EUV, JARA FIT, Steinbachstr 15, D-52074 Aachen, Germany

[2] Forschungszentrum Julich, Peter Grunberg Inst PGI 9, JARA FIT, D-52425 Julich, Germany

[3] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

[4] Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA

[5] Univ Calif Los Angeles, Calif Nano Syst Inst, Los Angeles, CA 90095 USA

来源：

X-RAY LASERS 2014 | 2016年 / 169卷

关键词：

RAY; RESOLUTION; MICROSCOPY;

D O I：

10.1007/978-3-319-19521-6_36

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrology.

引用

页码：275 / 280

页数：6

共 24 条

[1] Table-top reflectometer in the extreme ultraviolet for surface sensitive analysis [J].