A simple polysilicon TFT technology for display systems on glass

被引：22

作者：

Kumar, A ^{[1
]}

Sin, JKO ^{[1
]}

机构：

[1] Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Ctr Display Res, Clear Water Bay, Hong Kong

来源：

INTERNATIONAL ELECTRON DEVICES MEETING - 1997, TECHNICAL DIGEST | 1997年

关键词：

D O I：

10.1109/IEDM.1997.650436

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a simple low temperature (600 degrees C) polysilicon technology called the Elevated Channel TFT (ECTFT) technology is reported. This technology provides all the necessary components needed for the ultimate goal of building large area microelectronic systems on glass. These components include high current digital devices, kink-free analog devices, large storage capacitance with reduced area, high current driver devices and efficient memory devices. With this technology, small or medium size display systems on glass can be realized.

引用

页码：515 / 518

页数：4