The science & technology innovation capability is the significant factor that insures sustainable S&T innovation of high-tech industry. By the method of factor analysis, the article summarizes three factors which make up the S&T innovation capability of high-tech industry. In which, the S&T innovation resource input of high-tech industry is the most important factor, the second is industrialization of innovation resources and diffusivity, the third is supporting environment that is propitious to innovation. According to the score, we find the S&T innovation capability of high-tech industry from 1996 to 2007 has been upgrading continuously.