Calculation of temperature fields with a film-substrate interfacial layer model to discuss the layer-pair number effects on the damage thresholds of LaF3/MgF2 high reflectors at 355 nm

被引：19

作者：

Liu, Guanghui ^{[1
]}

Zhou, Ming ^{[1
]}

Hu, Guohang ^{[1
]}

Liu, Xiaofeng ^{[1
]}

Jin, Yunxia ^{[1
]}

He, Hongbo ^{[1
]}

Fan, Zhengxiu ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat High Power Lasers, Shanghai 201800, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2010年 / 256卷 / 13期

关键词：

LaF3/MgF2 high reflectors; Temperature fields; Film-substrate interface; LIDT; Layer-pair number; Damage depth; Damage mechanism; MULTILAYER COATINGS; OPTICAL-PROPERTIES; THIN-FILMS; ABSORPTION; 193NM;

D O I：

10.1016/j.apsusc.2010.02.003

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Laser induced damage thresholds (LIDT) of LaF3/MgF2 high reflectors at 355 nm were measured and investigated as a function of layer-pair number. Generally, LaF3/MgF2 coatings with more layer pairs possessed higher LIDT, but coatings with too high layer-pair number crazed because of high tensile stress, so the LIDT of them decreased badly. The temperature rise in the coatings was calculated based on a film-substrate interfacial absorption model, and the depth of the damage in the coatings were measured by a Veeco optical profilograph. The two characterization methods together were used to interpret the effects of layer-pair number on LIDT, and the damage mechanism of coatings at laser wavelength of 355 nm was also discussed. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：4206 / 4210

页数：5

共 15 条

[11] Critical issues on the assesment of laser induced damage thresholds of fluoride multilayer coatings at 193nm [J].