Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source

被引：32

作者：

Baksh, Peter D. ^{[1
]}

Odstrcil, Michal ^{[1
,2
]}

Kim, Hyun-Su ^{[1
,2
]}

Boden, Stuart A. ^{[3
]}

Frey, Jeremy G. ^{[4
]}

Brocklesby, William S. ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

[2] Rhein Westfal TH Aachen, Expt Phys EUV, JARA FIT, Steinbachstr 15, D-52074 Aachen, Germany

[3] Univ Southampton, Zepler Inst, Southampton SO17 1BJ, Hants, England

[4] Univ Southampton, Sch Chem, Southampton SO17 1BJ, Hants, England

来源：

OPTICS LETTERS | 2016年 / 41卷 / 07期

关键词：

CRYSTALLOGRAPHY;

D O I：

10.1364/OL.41.001317

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High-harmonic generation (HHG) provides a laboratoryscale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and x-ray spectral region. Here we demonstrate transmission extreme ultraviolet (EUV) ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm and fields of view up to similar to 100 mu m are demonstrated. These results demonstrate the potential for wide-field, high-resolution, laboratory-scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection. (C) 2016 Optical Society of America

引用

页码：1317 / 1320

页数：4

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