Scanning nanolithography using a material-filled nanopipette

被引：63

作者：

Hong, MH

Kim, KH

Bae, J

Jhe, W ^{[1
]}

机构：

[1] Seoul Natl Univ, Ctr Near Field Atom Photon Technol, Seoul 151742, South Korea

[2] Seoul Natl Univ, Dept Phys, Seoul 151742, South Korea

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 16期

关键词：

D O I：

10.1063/1.1319181

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A scanning nanolithography is demonstrated by employing near-field optical microscopy with a pulled micropipette which is used for material transport as well as distance regulation. Delivering the photoresist through the small aperture (300 nm diameter) of the pulled pipette with the shear-force distance control, we have fabricated nanometric dots (300 nm diameter) on the gold-sputtered substrate. This scheme may be also useful in nanometric control of chemical reaction and repair of nanometric structures. (C) 2000 American Institute of Physics. [S0003-6951(00)04542-3].

引用

收藏

页码：2604 / 2606

页数：3

相关论文

共 13 条

[1] COMBINED SHEAR FORCE AND NEAR-FIELD SCANNING OPTICAL MICROSCOPY [J].

BETZIG, E ;

FINN, PL ;

WEINER, JS .

APPLIED PHYSICS LETTERS, 1992, 60 (20) :2484-2486

[2] Influence of the water layer on the shear force damping in near-field microscopy [J].

Davy, S ;

Spajer, M ;

Courjon, D .

APPLIED PHYSICS LETTERS, 1998, 73 (18) :2594-2596

[3]

ISENBERG C, 1992, SCI SOAP FILMS SOAP, P120

[4] Novel digital feedback scheme of shear-force control in near-field scanning optical microscopy [J].

Kim, KH ;

Eah, SK ;

Lee, B ;

Chang, HC ;

Jhe, WH .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (07) :2783-2786

[5]

KIM KH, 1999, 5 INT C NEAR FIELD O, P373

[6] Fountain pen nanochemistry: Atomic force control of chrome etching [J].

Lewis, A ;

Kheifetz, Y ;

Shambrodt, E ;

Radko, A ;

Khatchatryan, E ;

Sukenik, C .

APPLIED PHYSICS LETTERS, 1999, 75 (17) :2689-2691

[7] MULTIFUNCTIONAL, MICROPIPETTE BASED FORCE CANTILEVERS FOR SCANNED PROBE MICROSCOPY [J].

LIEBERMAN, K ;

LEWIS, A ;

FISH, G ;

SHALOM, S ;

JOVIN, TM ;

SCHAPER, A ;

COHEN, SR .

APPLIED PHYSICS LETTERS, 1994, 65 (05) :648-650

[8] SIMULTANEOUS SCANNING TUNNELING AND OPTICAL NEAR-FIELD IMAGING WITH A MICROPIPETTE [J].

LIEBERMAN, K ;

LEWIS, A .

APPLIED PHYSICS LETTERS, 1993, 62 (12) :1335-1357

[9] Study of shear force between glass microprobe and mica surface under controlled humidity [J].

Okajima, T ;

Hirotsu, S .

APPLIED PHYSICS LETTERS, 1997, 71 (04) :545-547

[10] NEAR-FIELD SUBWAVELENGTH MICROPATTERN GENERATION - PIPETTE GUIDED ARGON FLUORIDE EXCIMER LASER MICROFABRICATION [J].

RUDMAN, M ;

LEWIS, A ;

MALLUL, A ;

HAVIV, V ;

TUROVETS, I ;

SHCHEMELININ, A ;

NEBENZAHL, I .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (09) :4379-4383