A printing technology combining screen-printing with a wet-etching process for the gate electrodes of organic thin film transistors on a plastic substrate

被引:23
作者
Lee, Mi-Young [1 ]
Lee, Myung-Won [1 ]
Park, Ji-Eun [2 ]
Park, Jong-Seung [3 ]
Song, Chung-Kun [1 ,2 ]
机构
[1] Dong A Univ, Media Device Lab, Pusan 604714, South Korea
[2] Dong A Univ, Dept Elect Engn, Pusan 604714, South Korea
[3] Dong A Univ, Dept Text Engn, Pusan 604714, South Korea
关键词
Organic thin film transistor (OTFT); Screen-printing; Wet-etching; Nano-silver ink; Gate electrode; FABRICATION; DRIVEN;
D O I
10.1016/j.mee.2009.11.073
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have developed a practical printing technology for the gate electrode of organic thin film transistors (OTFTs) by combining screen-printing with a wet-etching process using nano-silver (Ag) ink as a conducting material. An Ag film was deposited onto a PVP (polyvinylphenol)-coated PC (polycarbonate) plastic substrate by screen-printing with nano-Ag ink, where Ag content of 20 wt.% was mixed using a terpineol solvent. Subsequently, the film was cured at 200 degrees C for 60 min, and then finally wet-etched through patterned positive photo-resist masks. The screen-printed Ag electrode exhibited a minimum line width of similar to 5 mu m, a thickness of similar to 65 nm, and a resistivity of similar to 10(-6) Omega cm, producing good geometrical and electrical characteristics for a gate electrode. Additionally, it also provided good step coverage with the PVP dielectric layer, and consequently leakage current between the gate and source/drain electrodes was eliminated. Moreover, the electrical characteristic of the screen-printed Ag electrode was not significantly changed even after a bending test in which the Ag electrodes were bent with a bending radius of 6 mm and 2500 iterations of cyclic bending. OTFTs with the screen-printed Ag electrode produced a saturation mobility of 0.13 cm(2)/Vs and a current on/off ratio of 1.79 x 10(6), being comparable to those of an OTFT with a thermally evaporated Al gate electrode. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:1922 / 1926
页数:5
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