Convenient Preparation of High-Quality Specimens for Annealing Experiments in the Transmission Electron Microscope

被引：40

作者：

Duchamp, Martial ^{[1
,1
]}

Xu, Qiang ^{[2
,3
]}

Dunin-Borkowski, Rafal E. ^{[1
]}

机构：

[1] Forschungszentrum Julich, Peter Grunberg Inst, D-52428 Julich, Germany

[2] DENSsolutions, NL-2628 XH Delft, Netherlands

[3] Delft Univ Technol, Kavli Inst Nanosci, NL-2628 CJ Delft, Netherlands

来源：

MICROSCOPY AND MICROANALYSIS | 2014年 / 20卷 / 06期

关键词：

transmission electron microscopy; specimen preparation; focused ion beam milling; in situ annealing;

D O I：

10.1017/S1431927614013476

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A procedure based on focused ion beam milling and in situ lift-out is introduced for the preparation of high-quality specimens for in situ annealing experiments in the transmission electron microscope. The procedure allows an electron-transparent lamella to be cleaned directly on a heating chip using a low ion energy and back-side milling in order to minimize redeposition and damage. The approach is illustrated through the preparation of an Al-Mn-Fe complex metallic alloy specimen.

引用

页码：1638 / 1645

页数：8

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