Symmetry and symmetry breaking in electrostatic MEMS

被引:0
作者
Pelesko, JA [1 ]
Bernstein, DH [1 ]
McCuan, T [1 ]
机构
[1] Univ Delaware, Dept Math Sci, Newark, DE 19716 USA
来源
NANOTECH 2003, VOL 1 | 2003年
关键词
electrostatic actuation; pull-in; instability; semi-linear elliptic problem; symmetry breaking;
D O I
暂无
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
The use of electrostatic forces; to provide actuation is a method of central importance in microelectromechanical systems (MEMS) and is of growing importance in nanoelectromechanical systems (NEMS). The. study of electrostatic actuation has led to numerous interesting experimental, theoretical, and numerical results. Yet, surprisingly, even simple electrostatically actuated systems have secrets to reveal. Here, we study the electrostatic deflection of ail annular elastic membrane. We consider the so-called small aspect ratio approximate model of electrostatically deflected membranes. We ask whether or not solutions to this model automatically inherit the symmetry of the annular domain. Through a numerical investigation we show that in fact, asymmetric solutions exist. That is, there is asymmetry breaking bifurcation present in this model for the electrostatically deflected annular system.
引用
收藏
页码:304 / 307
页数:4
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