Scanning nuclear microprobe analysis of pulsed laser deposited thin films and particulates:: experiments and numerical modeling

被引：6
作者：
Kántor, Z
Simon, A
Kovács, M
机构：
[1] Univ Szeged, Hungarian Acad Sci, Res Grp Laser Phys, H-6701 Szeged, Hungary
[2] Hungarian Acad Sci, Inst Nucl Res, ATOMKI, H-4001 Debrecen, Hungary
[3] Univ Szeged, Dept Opt & Quantum Elect, H-6701 Szeged, Hungary
来源：
APPLIED SURFACE SCIENCE | 2003年 / 208卷
关键词：
microbeam; RBS; tomography; computer modeling; pulsed laser deposition; particulates; surface roughness;
D O I：
10.1016/S0169-4332(02)01374-0
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The thickness and chemical composition of pulsed laser deposited thin Bi and Si-Ge alloy films have been measured by Rutherford backscattering spectrometry (RBS) with micrometer lateral resolution. The experimental results are supplemented with computer simulations of RBS spectra, elemental maps and tomographic images, providing identification of different kinds of particulates and fine 3D information about the surface. The impact of surface roughness on RBS characterization of thin films is also discussed. (C) 2002 Elsevier Science B.V. All rights reserved.
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页码：540 / 546
页数：7
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