Soft lithography of ceramic microparts using wettability-tunable poly(dimethylsiloxane) (PDMS) molds

被引：9

作者：

Su, Bo ^{[1
,2
]}

Zhang, Aijun ^{[1
,2
]}

Meng, Junhu ^{[1
]}

Zhang, Zhaozhu ^{[1
]}

机构：

[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2016年 / 26卷 / 07期

基金：

中国国家自然科学基金;

关键词：

ceramics; microparts; micropatterns; soft lithography; PDMS; plasma treatment; HYDROPHOBIC RECOVERY; PLASMA; FILMS; SURFACES; SIZE;

D O I：

10.1088/0960-1317/26/7/075001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Green alumina microparts were fabricated from a high solid content aqueous suspension by microtransfer molding using air plasma-treated poly(dimethylsiloxane) (PDMS) molds. The wettability of the air plasma-treated PDMS molds spontaneously changed between the hydrophilic and hydrophobic states during the process. Initial hydrophilicity of the air plasmatreated PDMS molds significantly improved the flowability of the concentrated suspension. Subsequent hydrophobic recovery of the air plasma-treated PDMS molds enabled a perfect demolding of the green microparts. Consequently, defect-free microchannel parts of 60 mu m and a micromixer with an area of several square centimeters were successfully fabricated. In soft lithography, tuning the wetting behavior of PDMS molds has a great effect on the quality of ceramic microparts. Using wettability-tunable PDMS molds has great potential in producing complex-shaped and large-area ceramic microparts and micropatterns.

引用

页数：6

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