Micro wire electrochemical cutting by using in situ fabricated wire electrode

被引:116
作者
Zhu, D. [1 ]
Wang, K. [1 ]
Qu, N. S. [1 ]
机构
[1] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Res Ctr Nontradit Machining, Nanjing, Peoples R China
关键词
micromachining; ECM; wire;
D O I
10.1016/j.cirp.2007.05.057
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This study develops a micro wire electrochemical cutting process. Because of no electrode wear in this process a very thin metal wire can be used as the wire electrode. The tungsten wire electrode with the diameter of 5 mu m is electrochemically in situ fabricated for the production of micro structures with the slit width of less than 20 mu m. Effects of process parameters on the wire diameter in the wire etching and on the gap variation in the electrochemical cutting have been studied theoretically and experimentally. Many complex micro metal parts with structures of several ten micrometers have been obtained.
引用
收藏
页码:241 / 244
页数:4
相关论文
共 6 条
  • [1] Micro electrochemical machining of 3D micro structure using dilute sulfuric acid
    Kim, BH
    Na, CW
    Lee, YS
    Choi, DK
    Chu, CN
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2005, 54 (01) : 191 - 194
  • [2] EDM-lathe for micromachining
    Masuzawa, T
    Okajima, K
    Taguchi, T
    Fujino, M
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2002, 51 (01) : 355 - 358
  • [3] MCGEOUGH JA, 2001, ANN CIRP, V50, P499
  • [4] Rajurkar KP, 1999, CIRP ANNALS 1999: MANUFACTURING TECHNOLOGY, VOL 48 NO 2 1999, P567
  • [5] Electrochemical micromachining
    Schuster, R
    Kirchner, V
    Allongue, P
    Ertl, G
    [J]. SCIENCE, 2000, 289 (5476) : 98 - 101
  • [6] Modelling and simulation of micro EDM process
    Yu, ZY
    Kozak, J
    Rajurkar, KP
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2003, 52 (01) : 143 - 146