5 GHz band low phase noise Si-CMOS oscillator using FBAR

被引:0
作者
Tanifuji, Shoichi [1 ]
Ta, Tuan Thanh [1 ]
Kameda, Suguru [1 ]
Takagi, Tadashi [1 ]
Tsubouchi, Kazuo [1 ]
机构
[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
film bulk acoustic resonator (FBAR); 5; GHz; 90 nm silicon complementary metal oxide semiconductor (Si-CMOS); low phase noise; oscillator;
D O I
10.1587/elex.7.165
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, low phase noise 5 GHz oscillator is presented. This oscillators designed with 90 nm silicon complementary metal oxide semiconductor (Si-CMOS) process. To achieve low phase noise, we used high Q value film bulk acoustic resonator (FBAR) instead of conventional LC resonant circuit. This FBAR oscillator has phase noise of lower than -130 dBc/Hz at 1MHz offset.
引用
收藏
页码:165 / 169
页数:5
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