Structure evolution and mechanical properties of Ta-Nb-Ti-W-N multielement films

被引：3
作者：
Feng, X. G. [1 ,2 ]
Ma, X. X. [1 ]
Tang, G. Z. [1 ]
Zhou, H. [2 ]
机构：
[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
[2] Lanzhou Inst Phys, Lanzhou 730000, Peoples R China
来源：
SURFACE ENGINEERING | 2014年 / 30卷 / 11期
关键词：
Multielement films; Structure; Hardness; Wear; IMMERSION ION-IMPLANTATION; COATINGS; DEPOSITION; MICROSTRUCTURE; RESISTANCE; TITANIUM; NITROGEN; ENERGY; BIAS;
D O I：
10.1179/1743294414Y.0000000329
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this study, the multielement films (Ta50.5Nb16.7Ti8.8W24.0)N, (Ta25.4Nb13.4Ti20.9W40.3)N and (Ta9.3Nb4.7Ti22.6W63.4)N are prepared by combining magnetron sputtering deposition and nitrogen plasma based ion implantation (N-PBII). The composition, structure and mechanical properties of the films are investigated. X-ray diffraction patterns show that the alloy films Ta50.5Nb16.7Ti8.8W24.0, Ta25.4Nb13.4Ti20.9W40.3 and Ta9.3Nb4.7Ti22.6W63.4 are composed of hcp+bcc, two types of bcc and a single bcc solid solution respectively, whereas all the Ta-Nb- Ti-W films are composed of bcc and fcc structures after N-PBII treatment. The lattice constant increases for both the bcc and fcc phases, while it decreases for the Ta and Nb concentrations in the films. The hardness and modulus of the Ta-Nb-Ti-W-N films are improved with increasing nitrogen implantation dose. The wear rate of the Ta25.4Nb13.4Ti20.9W40.3 with nitrogen implantation for 1 h is decreased two times than the Ta25.4Nb13.4Ti20.9W40.3 alloy films.
引用
收藏
页码：842 / 846
页数：5
相关论文
共 21 条
[1]   Multiphase films bearing Ti2AlN by pulse plasma hollow cathode nitriding [J].
Cong, T. ;
Yan, M. F. ;
Liu, R. L. .
SURFACE ENGINEERING, 2013, 29 (05) :336-341
[2]   The microstructure, mechanical and tribological properties of TiN coatings after Nb and C ion implantation [J].
Deng, Bin ;
Tao, Ye ;
Hu, Zhijie .
APPLIED SURFACE SCIENCE, 2013, 284 :405-411
[3]   Study of the microstructure and tribological properties of Mo plus C-implanted TiN coatings on cemented carbide substrates [J].
Deng, Bin ;
Tao, Ye ;
Wang, Yu ;
Liu, Peiying .
SURFACE & COATINGS TECHNOLOGY, 2013, 228 :S597-S600
[4]   Determination of the local environment of silicon and the microstructure of quaternary CrAl(Si)N films [J].
Endrino, J. L. ;
Palacin, S. ;
Aguirre, M. H. ;
Gutierrez, A. ;
Schaefers, F. .
ACTA MATERIALIA, 2007, 55 (06) :2129-2135
[5]   Chemical state and phase structure of (TaNbTiW)N films prepared by combined magnetron sputtering and PBII [J].
Feng, Xingguo ;
Tang, Guangze ;
Sun, Mingren ;
Ma, Xinxin ;
Wang, Liqin .
APPLIED SURFACE SCIENCE, 2013, 280 :388-393
[6]   Effect of mechanical properties measured at room and elevated temperatures on the wear resistance of cutting tools with TiAlN and AlCrN coatings [J].
Fox-Rabinovich, GS ;
Beake, BD ;
Endrino, JL ;
Veldhuis, SC ;
Parkinson, R ;
Shuster, LS ;
Migranov, MS .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (20-21) :5738-5742
[7]   Investigation of nitrogen mass transfer within an industrial plasma nitriding system I: The role of surface deposits [J].
Hubbard, P. ;
Partridge, J. G. ;
Doyle, E. D. ;
McCulloch, D. G. ;
Taylor, M. B. ;
Dowey, S. J. .
SURFACE & COATINGS TECHNOLOGY, 2010, 204 (08) :1145-1150
[8]   Influence of bias voltage on the formation and properties of iron-based nitrides produced by plasma nitriding [J].
Li, Yang ;
Wang, Liang ;
Zhang, Dandan ;
Shen, Lie .
JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 497 (1-2) :285-289
[9]   Mechanical performance and nanoindenting deformation of (AlCrTaTiZr)NCy multi-component coatings co-sputtered with bias [J].
Lin, Shao-Yi ;
Chang, Shou-Yi ;
Huang, Yi-Chung ;
Shieu, Fuh-Sheng ;
Yeh, Jien-Wei .
SURFACE & COATINGS TECHNOLOGY, 2012, 206 (24) :5096-5102
[10]   Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering [J].
Liu, YM ;
Li, LH ;
Xu, M ;
Cai, X ;
Chen, QL ;
Hu, YW ;
Chu, PK .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2006, 415 (1-2) :140-144
123