Thermal stability of sputtered nanocrystalline hard coatings

被引：0
作者：
Willmann, H [1 ]
Mayrhofer, PH
Beschliesser, M
Mitterer, C
机构：
[1] Montauniv Leoben, Inst Met & Werkstoffprufung, A-8700 Leoben, Austria
[2] Mat Ctr Leoben, A-8700 Leoben, Austria
来源：
PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY | 2004年 / 41卷 / 08期
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D O I：
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中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
This article deals with the thermal stability of magnetron sputtered hard coatings, i.e. their resistance against oxidation and recrystallization, depending on their chemical compositions. The oxidation behaviour of films in the chromium-nitrogen system was studied by thermogravimetric measurements at different temperatures. Dynamic differential scanning calorimetry was employed to characterize the recrystallization behaviour and the succeeding grain growth. The investigated samples were multiphase nanocrystalline coatings within the titaniumboron-nitrogen system. In addition, the film structures and grain sizes prior to and after the thermal analysis were investigated by means of X-ray diffraction (XRD).
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页码：397 / 408
页数：12
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