Evaluation of a linear hybrid microstep motor by means of magnetic flux measurements

被引:8
作者
Hahn, M. [1 ]
Bedenbecker, M. [1 ]
Gatzen, H. H. [1 ]
机构
[1] Leibniz Univ Hannover, Inst Microelect, D-30823 Hannover, Germany
关键词
hard magnetic material; microactuator; thin-film technology;
D O I
10.1109/TMAG.2007.892864
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
There are two step motor principles for building up linear microactuators: variable reluctance (VR) and hybrid. While the VR motors use only soft magnetic material for guiding the magnetic flux, hybrid motors use permanent magnets as a source of static magnetic flux, as well. The benefit is a greater driving force, while the drawback is a more difficult fabrication process. The working principle of the hybrid motors requires the flux created by the permanent magnets to be of the same magnitude as the flux created by the excited coils. Therefore, it was investigated how to ensure that the two fluxes match. This paper describes the approach taken and the resulting advances in the fabrication of the micromotor.
引用
收藏
页码:2588 / 2590
页数:3
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