Synthesis of GaN nanowires through Ga2O3 films' reaction with ammonia

被引:38
作者
Ai, Yujie
Xue, Chengshan
Sun, Chuanwei
Sun, Lili
Zhuang, Huizhao
Wang, Fuxue
Li, Hong
Chen, Jinhua
机构
[1] Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China
[2] Jinan Univ, Sch Informat Sci & Engn, Jinan 250022, Peoples R China
基金
中国国家自然科学基金;
关键词
crystal growth; epitaxial growth; GaN; nanowires; Ti;
D O I
10.1016/j.matlet.2006.11.038
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
GaN nanowires were synthesized by ammoniating Ga2O3 films on Ti layers deposited on Si (111) substrates at 950 degrees C. The products were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Fourier transformed infrared spectroscopy (FTIR) and high-resolution transmission electron microscopy (HRTEM). The XRD, FTIR and HRTEM studies showed that these nanowires were hexagonal GaN single crystals. SEM observation demonstrated that these GaN nanorods with diameters ranging from 50 nm to 100 nm and lengths up to several micrometers intervene with each other on the substrate. (C) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:2833 / 2836
页数:4
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