Photochemical reaction on ITO surface induced by soft X-ray irradiation

被引：1

作者：

Liu, LM ^{[1
]}

Xiong, YQ ^{[1
]}

Guo, Y ^{[1
]}

Li, GB ^{[1
]}

Yang, DQ ^{[1
]}

机构：

[1] Chinese Acad Space Technol, Lab Appl Surface Phys, Lanzhou Inst Phys, Lanzhou 730000, Peoples R China

来源：

ACTA PHYSICA SINICA | 2000年 / 49卷 / 09期

关键词：

irradiation by X-ray; photoelectron spectroscopy; photochemical reaction;

D O I：

10.7498/aps.49.1883

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

ITO surface photochemical reaction induced by soft X-ray (Mg K alpha = 1253.60 eV) irradiation is investigated in-situ by XPS technique. The result shows that the content of In and Sn in the irradiated area goes up with the increasing irradiation time, while that of O falls. The changes of In3d, Sn3d XPS spectra and the Auger Parameter of In, Sn suggest that there is chemical reaction due to X-ray irradiation. It can be concluded that more photo-dissociation happens to In element according to the obvious fact that there exists sub-oxidized state of In after exposure to X-ray. The photochemical reaction mechanism induced by soft X-ray irradiation is discussed.

引用

页码：1883 / 1886

页数：4

共 17 条

[1] XPS AND IR STUDY OF X-RAY-INDUCED DEGRADATION OF PVA POLYMER FILM
AKHTER, S
ALLAN, K
BUCHANAN, D
COOK, JA
CAMPION, A
WHITE, JM
[J]. APPLIED SURFACE SCIENCE, 1988, 35 (02) : 241 - 258
[2] ITO-COATED RF TRANSPARENT MATERIALS FOR ANTENNA SUNSHIELDS - SPACE ENVIRONMENT EFFECTS
BOWMAN, C
BOGORAD, A
BRUCKER, G
SEEHRA, S
LLOYD, T
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1990, 37 (06) : 2134 - 2137
[3] X-RAY-INDUCED BEAM DAMAGE OBSERVED DURING X-RAY PHOTOELECTRON-SPECTROSCOPY (XPS) STUDIES OF PALLADIUM ELECTRODE INK MATERIALS
BROWN, NMD
HEWITT, JA
MEENAN, BJ
[J]. SURFACE AND INTERFACE ANALYSIS, 1992, 18 (03) : 187 - 198
[4] AN INVESTIGATION BY ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS OF CHEMICAL TREATMENTS OF THE (100) SURFACE OF N-TYPE INP EPITAXIAL LAYERS FOR LANGMUIR FILM DEPOSITION
CLARK, DT
FOK, T
ROBERTS, GG
SYKES, RW
[J]. THIN SOLID FILMS, 1980, 70 (02) : 261 - 283
[5] CLARK DT, 1977, ADV POLYM SCI, V24, P125
[6] REINTERPRETATION OF ELECTRON-STIMULATED DESORPTION DATA FROM CHEMISORPTION SYSTEMS
FEIBELMAN, PJ
KNOTEK, ML
[J]. PHYSICAL REVIEW B, 1978, 18 (12): : 6531 - 6539
[7] ESCA STUDIES OF THE THERMAL AND X-RAY-INDUCED DEGRADATION OF CELLULOSE NITRATES
FOWLER, AHK
MUNRO, HS
CLARK, DT
[J]. POLYMER DEGRADATION AND STABILITY, 1985, 11 (04) : 287 - 296
[8] CORE EXCITATION AND IONIZATION OF MOLECULES
HITCHCOCK, AP
[J]. PHYSICA SCRIPTA, 1990, T31 : 159 - 170
[9] STABILITY OF IONICALLY BONDED SURFACES IN IONIZING ENVIRONMENTS
KNOTEK, ML
FEIBELMAN, PJ
[J]. SURFACE SCIENCE, 1979, 90 (01) : 78 - 90
[10] ITO surface ball formation induced by atomic hydrogen in PECVD and HW-CVD tools
Lan, JH
Kanicki, J
[J]. THIN SOLID FILMS, 1997, 304 (1-2) : 123 - 129

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