Influence of DC Bias Voltage on Structure and Performance of the Al-Cr-Si-N Coatings Prepared by Arc Ion Plating Technique

被引：0

作者：

Zhang Jiaojiao ^{[1
]}

Wang Tiegang ^{[1
]}

Yan Bing ^{[1
]}

Liu Yuan ^{[1
]}

Jiang Sumeng ^{[2
]}

Dong Yu ^{[1
]}

机构：

[1] Tianjin Univ Technol & Educ, Tianjin Key Lab High Speed Cutting & Precis Mfg, Tianjin 300222, Peoples R China

[2] Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China

来源：

RARE METAL MATERIALS AND ENGINEERING | 2018年 / 47卷 / 07期

关键词：

Al-Cr-Si-N coating; microstructure; microhardness; residual stress; friction and wear; MECHANICAL-PROPERTIES; THIN-FILMS; CRALSIN COATINGS; TRIBOLOGICAL PROPERTIES; THERMAL-PROPERTIES; MICROSTRUCTURE; SYSTEM; HIPIMS; HARD; DEPOSITION;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Al-Cr-Si-N coatings were deposited by an arc ion plating (AIP) technique at various DC bias voltages. The effects of bias voltage on the microstructure, phase composition, mechanical and wear properties of the Al-Cr-Si-N coatings were investigated. The results show that the AI-Cr-Si-N coating is mainly composed of the hexagonal structure and the face-centered cubic structure of AIN phase. With the increase of substrate bias, the diffraction peak of the coating shifts to the small angle, and compressive stress gradually increases, whose maximum value is -0.77 GPa; however, the hardness and friction coefficient of the coating do not change significantly. When the negative bias of the substrate is -40 V, the characteristic parameters HIE and H-3/E-*2 of the Al-Cr-Si-N coating reach the maximum values of 0.15 and 0.37 GPa, respectively. At the same time, the coating has the best wear resistance and the lowest friction coefficient.

引用

页码：2232 / 2239

页数：8

共 47 条

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