Piezoelectric microactuators for use in magnetic disk drives

被引：4

作者：

Kurihara, K

Hida, M

Umemiya, S

Koganezawa, S

机构：

[1] Fujitsu Labs Ltd, Mat & Environm Engn Labs, Kanagawa 2430197, Japan

[2] Fujitsu Ltd, HDD Dev Dept, Kanagawa 2118588, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2004年 / 43卷 / 9B期

关键词：

PNN-PT-PZ; microactuator; magnetic disk drive;

D O I：

10.1143/JJAP.43.6725

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A head-slider drive dual-stage microactuator system for use in magnetic disk drives was developed. This microactuator system has a symmetrical structure and operation, and utilizes simple rectangular multilayered piezoelectric actuator devices. A prototype model with a pico slider and head suspension was tested and demonstrated. It exhibited a 0.8 mum displacement at a do applied voltage of 30 V and a fundamental resonant frequency of over 20 kHz.

引用

页码：6725 / 6727

页数：3

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