Piezoelectric microactuators for use in magnetic disk drives

被引：4
|
作者：
Kurihara, K
Hida, M
Umemiya, S
Koganezawa, S
机构：
[1] Fujitsu Labs Ltd, Mat & Environm Engn Labs, Kanagawa 2430197, Japan
[2] Fujitsu Ltd, HDD Dev Dept, Kanagawa 2118588, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2004年 / 43卷 / 9B期
关键词：
PNN-PT-PZ; microactuator; magnetic disk drive;
D O I：
10.1143/JJAP.43.6725
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A head-slider drive dual-stage microactuator system for use in magnetic disk drives was developed. This microactuator system has a symmetrical structure and operation, and utilizes simple rectangular multilayered piezoelectric actuator devices. A prototype model with a pico slider and head suspension was tested and demonstrated. It exhibited a 0.8 mum displacement at a do applied voltage of 30 V and a fundamental resonant frequency of over 20 kHz.
引用
收藏
页码：6725 / 6727
页数：3
相关论文
共 50 条
  • [21] A MEMS piggyback actuator for hard-disk drives
    Toshiyoshi, H
    Mita, M
    Fujita, H
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (06) : 648 - 654
  • [22] Comparison of microactuators based on piezoelectric layered plates with d31 and d33 coupling
    Nguyen, Cuong H.
    Hanke, Ulrik
    Halvorsen, Einar
    ACTIVE AND PASSIVE SMART STRUCTURES AND INTEGRATED SYSTEMS 2016, 2016, 9799
  • [23] Preparation and properties of piezoelectric lead zirconate titanate thin films for microsensors and microactuators by sol-gel processing
    Tuchiya, T
    Itoh, T
    Sasaki, G
    Suga, T
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1996, 104 (03) : 159 - 163
  • [24] Dual-Stage Nanopositioning Scheme for 10 Tbit/in2 Hard Disk Drives With a Shear-Mode Piezoelectric Single-Crystal Microactuator
    Zhang, Lei
    Yao, Kui
    Keikha, Ehsan
    Chen, Yi Fan
    Rahman, Md. Arifur
    Al Mamun, Abdullah
    Bhatia, Charanjit Singh
    IEEE TRANSACTIONS ON MAGNETICS, 2015, 51 (04)
  • [25] Dynamics of thin-film piezoelectric microactuators with large vertical stroke subject to multi-axis coupling and fabrication asymmetries
    Choi, Jongsoo
    Wang, Thomas
    Oldham, Kenn
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 28 (01)
  • [26] MEMS-based integrated head/actuator/slider for hard disk drives
    Imamura, T
    Katayama, M
    Ikegawa, Y
    Ohwe, T
    Koishi, R
    Koshikawa, T
    IEEE-ASME TRANSACTIONS ON MECHATRONICS, 1998, 3 (03) : 166 - 174
  • [27] Development of a Φ-shaped actuated suspension for 100-kTPI hard disk drives
    Tokuyama, M
    Shimizu, T
    Masuda, H
    Nakamura, S
    Hanya, M
    Iriuchijima, O
    Soga, J
    IEEE TRANSACTIONS ON MAGNETICS, 2001, 37 (04) : 1884 - 1886
  • [28] Direct SISO loop design of tracking servo system for optical disk drives
    Yang, JD
    Pei, XD
    Pan, LF
    OPTICAL RECORDING, STORAGE, AND RETRIEVAL SYSTEMS, 1996, 2890 : 43 - 48
  • [29] Newly Designed Slider-Based Micro-Actuator for Magnetic Disk Drive
    Nojima, Yusuke
    Koganezawa, Shinji
    JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING, 2011, 5 (01): : 45 - 53
  • [30] Characteristics of the contact force between the head-slider and the disk in a magnetic disk drive
    Department of Precision Engineering, Nihon University, 724-1 Narashino-dai, Funabashi-shi, Chiba, 274-8501, Japan
    Nihon Kikai Gakkai Ronbunshu C, 2006, 5 (1521-1529): : 1521 - 1529
12345