Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas

被引：11
|
作者：
Nakai, Yasuki [1 ]
Kang, Yuji [1 ]
Okada, Makoto [1 ,3 ]
Haruyama, Yuichi [1 ]
Kanda, Kazuhiro [1 ]
Ichihashi, Tetsuya [2 ]
Matsui, Shinji [1 ]
机构：
[1] Univ Hyogo, Kamigori, Hyogo 6781205, Japan
[2] NEC Corp Ltd, Nano Elect Res Labs, Tsukuba, Ibaraki 3058051, Japan
[3] Japan Soc Promot Sci, Chiyoda Ku, Tokyo 1028472, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2010年 / 49卷 / 06期
关键词：
DIAMOND-LIKE-CARBON;
D O I：
10.1143/JJAP.49.06GH07
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The mechanical characteristics of iron-containing nanosprings (Fe-containing nanosprings) fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) using a ferrocene (C10H10Fe) source gas were investigated. The shear and Young's moduli were 34 and 92 GPa, respectively. We also evaluated the annealing effect of Fe-containing nanosprings and observed a droplet containing Fe and Ga on the nanospring after annealing at 600 degrees C. The spring constant rapidly decreased after annealing at 600 degrees C. By scanning electron microscopy energy-dispersive X-ray spectroscopy (SEM-EDX) and transmission electron microscopy energy-dispersive X-ray spectroscopy (TEM-EDX) line analysis, it was confirmed that the decrease in the spring constant was due to Ga removal. (C) 2010 The Japan Society of Applied Physics
引用
收藏
页码：06GH071 / 06GH074
页数：4
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