High-Quality Factor Ni-Zn Ferrite Planar Inductor

被引:20
作者
Lee, Jae-Jin [1 ,2 ]
Hong, Yang-Ki [1 ,2 ]
Bae, Seok [1 ,2 ]
Park, Ji-Hoon [1 ,2 ]
Jalli, Jeevan [1 ,2 ]
Abo, Gavin S. [1 ,2 ]
Syslo, Ryan [1 ,2 ]
Choi, Byoung-Chul [3 ]
Donohoe, Gregory W. [4 ]
机构
[1] Univ Alabama, Dept Elect & Comp Engn, Tuscaloosa, AL 35487 USA
[2] Univ Alabama, MINT Ctr, Tuscaloosa, AL 35487 USA
[3] Univ Victoria, Dept Phys & Astron, Victoria, BC V8W 3P6, Canada
[4] Univ Idaho, Dept Elect & Comp Engn, Moscow, ID 83844 USA
关键词
Current capability; DC-DC converter; electrophoresis deposition; electrophoresis ferrite deposition (EPD); Ni-Zn ferrite; planar inductor; DC; FILM;
D O I
10.1109/TMAG.2010.2044377
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ferrite and air-core planar inductor arrays were fabricated on 4 inch Si wafer to characterize inductor performance. Three micron thick Ni0.5Zn0.5Fe2O4 film was deposited by a low temperature electrophoresis ferrite deposition process. All ferrite inductors in the array showed 35% higher inductance (L) and 130% higher quality factor (Q) than air-core inductor. The maximum Q of ferrite inductor was found to be 53 at 2 MHz. The superimposed DC current and the rated power were measured to be about 3 A and 15 W, respectively, for a 5% drop in. The fabricated ferrite inductor has a higher current capability than the air-core inductor. In addition, the power efficiency of the buck DC-DC converter was predicted to be 94.3% at 1.93 W.
引用
收藏
页码:2417 / 2420
页数:4
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