Modeling Analysis of Piezoelectric Micromachined Modal Gyroscope (PMMG)

被引：1

作者：

Wu, Xiaosheng ^{[1
]}

Chen, Wenyuan ^{[1
]}

Zhang, Weiping ^{[1
]}

Lu, Yipeng ^{[1
]}

Cui, Feng ^{[1
]}

Zhao, Xiaolin ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China

来源：

2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年

关键词：

Micromachined Gyroscope; Piezoelectric; Modal; Model; concentrated masses; ROTATION;

D O I：

10.1109/NEMS.2009.5068583

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel kind of MEMS micro-gyroscope, piezoelectric micromachined modal gyroscope (PMMG), is introduced in the paper. PMMG works with the special vibratory mode of solid material, and it is a kind of solid-state micro-gyroscope, which is different from micromachined vibratory gyroscope. There is no moving part and suspended structure in PMMG, and it is robust for the higher resistance to shock and shake. PMMG has no special requirement on vacuum package, so it has higher stability and reliability. The working mechanism of PMMG is introduced in the paper. A model of PMMG with concentrated masses is proposed in the paper, and using finite element method (FEM), its modal and harmonic analysis are compared with the model without concentrated mass. The results show that the model with concentrated masses has lower modal frequency and larger vibratory amplitude. The Coriolis effect analysis of the two kinds of model shows that the model with concentrated mass is favorable to increase the sensitivity of PMMG. The work of the paper provides theory foundation for further research of PMMG.

引用

页码：304 / 309

页数：6

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