Assessment of ferromagnetic integrated inductors for SI-technology

被引:17
作者
Rejaei, B [1 ]
Vroubel, M [1 ]
Zhuang, Y [1 ]
Burghartz, JN [1 ]
机构
[1] Delft Univ Technol, DIMES, Lab Elect Components Technol & Mat, NL-2628 AL Delft, Netherlands
来源
2003 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS | 2003年
关键词
RF; integrated inductor; soft magnetic materials;
D O I
10.1109/SMIC.2003.1196679
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Recent experimental results for integrated magnetic inductors for radio frequency (RF) applications are reviewed. The effects of eddy-current loss in the conductive ferromagnetic film, permeability anisotropy, and inductor geometry on the inductance of magnetic inductors are discussed using several examples.
引用
收藏
页码:100 / 103
页数:4
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