PIEZOELECTRIC TANTALUM ALUMINUM NITRIDE FILMS FOR VIBRATIONAL MICRO ENERGY HARVESTERS

被引：2
|
作者：
Le Van Minh [1 ]
Kuwano, Hiroki [1 ]
机构：
[1] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi, Japan
来源：
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) | 2021年
关键词：
Doped AlN film; piezoelectric generators; vibrational micro-energy harvesters; MEMS;
D O I：
10.1109/MEMS51782.2021.9375199
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports the first attempt to apply highly piezoelectric Ta-doped AN thin films for vibration-driven micro energy harvesters. TaxAl1-xN (x = 0.068) films were grown on Pt/Ti/Si substrates and applied to microfabricate energy harvesters. The Ta-AlN films exhibit a highly c-axis crystal orientation and good electrical properties with low leakage current density of 0.2 x10(-6) A/cm(2) and low loss tangent of 0.02. Our prototype of the Ta-AlN based micro energy harvesters shows the normalized power density (NPD) of 13.7 mW.g(-2).cm(3). This result was an approximately 6-fold increase compared to the best of the published pure AN harvesters and outperformed the PZT-based ones. Also, our first attempt is approaching to the best-published performance of the higher co-dopant concentration (MgHf)(0.11)Al0.89N and Sc0.43Al0.57N.
引用
收藏
页码：242 / 245
页数：4
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