Diamond-based surface acoustic wave devices

被引：57
|
作者：
Nakahata, H [1 ]
Fujii, S [1 ]
Higaki, K [1 ]
Hachigo, A [1 ]
Kitabayashi, H [1 ]
Shikata, S [1 ]
Fujimori, N [1 ]
机构：
[1] Sumitomo Elect Ind Ltd, IT Components Div, Itami, Hyogo 6640016, Japan
来源：
SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2003年 / 18卷 / 03期
关键词：
D O I：
10.1088/0268-1242/18/3/314
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Research and development have been carried out to apply the CVD diamond film to surface acoustic wave (SAW) devices. Several kinds of layered structures including a diamond layer have been investigated by the calculations and experiments, and it has been found that the diamond SAW has great advantages for the application of high-frequency SAW devices with high SAW velocity, small temperature coefficient and high power durability. Practical SAW devices have been successfully fabricated with ZnO/diamond/Si and SiO2/ZnO/diamond/Si structures whose characteristics are superior to those with conventional SAW materials.
引用
收藏
页码：S96 / S104
页数：9
相关论文
共 50 条
  • [1] Growth and characterization of piezoelectric AlN thin films for diamond-based surface acoustic wave devices
    Benetti, M
    Cannatà, D
    Di Pietrantonio, F
    Verona, E
    Generosi, A
    Paci, B
    Albertini, VR
    THIN SOLID FILMS, 2006, 497 (1-2) : 304 - 308
  • [2] Effect on coupling coefficient of diamond-based surface acoustic wave devices using two layers of piezoelectric materials of different widths
    Han, Xu
    Wang, Fang
    Zhang, Kailiang
    Kong, Deqing
    Hu, Kai
    Qian, Lirong
    Li, Lianqiu
    Nie, Weican
    Yang, Zuodong
    DIAMOND AND RELATED MATERIALS, 2022, 125
  • [3] Diamond-based MEMS devices
    Kohn, E
    Ebert, W
    Adamschik, M
    Schmid, P
    Denisenko, A
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2001, 11 (02): : 81 - 100
  • [4] CVD diamond for surface acoustic wave devices
    Elmazria, O
    Assouar, MB
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2001, 56 (300): : 462 - +
  • [5] A study of highly c-axis oriented AIN films for diamond-based surface acoustic wave devices:: Bulk structure and surface morphology
    Paci, Barbara
    Generosi, Amanda
    Albertini, Valerio Rossi
    Benetti, Massimiliano
    Cannata, Domenico
    Di Pietrantonio, Fabio
    Verona, Enrico
    SENSORS AND ACTUATORS A-PHYSICAL, 2007, 137 (02) : 279 - 286
  • [6] PIEZOELECTRICALLY EXCITED SURFACE ACOUSTIC WAVES IN DIAMOND-BASED COMPONENTS
    Glushkov, E.
    Glushkova, N.
    Zhang, Ch
    2012 INTERNATIONAL CONFERENCE ON MATHEMATICAL METHODS IN ELECTROMAGNETIC THEORY (MMET), 2012, : 459 - 462
  • [7] Deposition of aluminium nitride film by magnetron sputtering for diamond-based surface acoustic wave applications
    Mortet, V
    Nesladek, M
    D'Haen, J
    Vanhoyland, G
    Elmazria, O
    Assouar, MB
    Alnot, P
    D'Olieslaeger, M
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2002, 193 (03): : 482 - 488
  • [8] Surface acoustic wave devices based on nanocrystalline diamond and aluminium nitride
    Bénédic, F
    Assouar, MB
    Mohasseb, F
    Elmazria, O
    Alnot, P
    Gicquel, A
    DIAMOND AND RELATED MATERIALS, 2004, 13 (02) : 347 - 353
  • [9] Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices
    Fu, Y. Q.
    Garcia-Gancedo, L.
    Pang, H. F.
    Porro, S.
    Gu, Y. W.
    Luo, J. K.
    Zu, X. T.
    Placido, F.
    Wilson, J. I. B.
    Flewitt, A. J.
    Milne, W. I.
    BIOMICROFLUIDICS, 2012, 6 (02)
  • [10] Diamond-based plasmonic terahertz devices
    Hasan, Muhammad Mahmudul
    Zhang, Yuhiu
    Pala, Nezih
    Shur, Michael
    2023 IEEE 16TH DALLAS CIRCUITS AND SYSTEMS CONFERENCE, DCAS, 2023,
12345