Scaling of submonolayer island sizes in surfactant-mediated epitaxy of semiconductors -: art. no. 085401

被引:20
作者
Cherepanov, V
Filimonov, S
Myslivecek, J
Voigtländer, B
机构
[1] Forschungszentrum Julich, Inst Schichten & Grenzflachen ISG 3, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Cni Ctr Nanoelect Syst Informat Technol, D-52425 Julich, Germany
关键词
D O I
10.1103/PhysRevB.70.085401
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We study submonolayer island size distributions in the epitaxy of Si and Ge on the Si(111) surface with Bi as a surfactant. We show that sizes of Si islands at different growth temperatures scale to a standard scaling function that peaks at the mean island size. Size distribution of Ge islands demonstrates qualitatively different behavior: With the decreasing temperature the most probable size in the population of Ge islands shifts towards small island sizes so that the peaked scaling function degenerates to a decreasing one. The observed scaling phenomena are found to be inherent to the mechanism of growth which involves exchange and de-exchange processes of deposited atoms with the surfactant and the strong passivation of step edges in the presence of the surfactant.
引用
收藏
页码:085401 / 1
页数:6
相关论文
共 39 条
[1]   CRITICAL CLUSTER-SIZE - ISLAND MORPHOLOGY AND SIZE DISTRIBUTION IN SUBMONOLAYER EPITAXIAL-GROWTH [J].
AMAR, JG ;
FAMILY, F .
PHYSICAL REVIEW LETTERS, 1995, 74 (11) :2066-2069
[2]   Nucleation behavior in molecular beam and chemical vapor deposition of silicon on Si(111)-(7x7) [J].
Andersohn, L ;
Berke, T ;
Kohler, U ;
Voigtlander, B .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (02) :312-318
[3]  
[Anonymous], 1937, IZV AKAD NAUK SSSR M
[4]   Kinetics of phase change I - General theory [J].
Avrami, M .
JOURNAL OF CHEMICAL PHYSICS, 1939, 7 (12) :1103-1112
[5]   SCALING ANALYSIS OF DIFFUSION-MEDIATED ISLAND GROWTH IN SURFACE-ADSORPTION PROCESSES [J].
BARTELT, MC ;
EVANS, JW .
PHYSICAL REVIEW B, 1992, 46 (19) :12675-12687
[6]   NEW ALGORITHM FOR MONTE-CARLO SIMULATION OF ISING SPIN SYSTEMS [J].
BORTZ, AB ;
KALOS, MH ;
LEBOWITZ, JL .
JOURNAL OF COMPUTATIONAL PHYSICS, 1975, 17 (01) :10-18
[7]   ISLAND SCALING IN STRAINED HETEROEPITAXY - INAS/GAAS(001) [J].
BRESSLERHILL, V ;
VARMA, S ;
LORKE, A ;
NOSHO, BZ ;
PETROFF, PM ;
WEINBERG, WH .
PHYSICAL REVIEW LETTERS, 1995, 74 (16) :3209-3212
[8]   Measuring surface diffusion from nucleation island densities [J].
Brune, H ;
Bales, GS ;
Jacobsen, J ;
Boragno, C ;
Kern, K .
PHYSICAL REVIEW B, 1999, 60 (08) :5991-6006
[9]   NUCLEATION WITH A CRITICAL CLUSTER-SIZE OF ZERO - SUBMONOLAYER FE INCLUSIONS IN CU(100) [J].
CHAMBLISS, DD ;
JOHNSON, KE .
PHYSICAL REVIEW B, 1994, 50 (07) :5012-5015
[10]   SURFACTANTS IN EPITAXIAL-GROWTH [J].
COPEL, M ;
REUTER, MC ;
KAXIRAS, E ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :632-635