-1 V bias 67 GHz bandwidth Si-contacted germanium waveguide p-i-n photodetector for optical links at 56 Gbps and beyond

被引:177
作者
Chen, H. [1 ,2 ]
Verheyen, P. [1 ]
De Heyn, P. [1 ]
Lepage, G. [1 ]
De Coster, J. [1 ]
Balakrishnan, S. [1 ]
Absil, P. [1 ]
Yao, W. [3 ]
Shen, L. [3 ]
Roelkens, G. [2 ]
Van Campenhout, J. [1 ]
机构
[1] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
[2] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp, B-9000 Ghent, Belgium
[3] Eindhoven Univ Technol, Photon Integrat Grp, POB 513, NL-5600 MB Eindhoven, Netherlands
关键词
SILICON; GE; PHOTODIODE;
D O I
10.1364/OE.24.004622
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate a 67 GHz bandwidth silicon-contacted germanium waveguide p-i-n photodetector operating at -1 V with 6.8 fF capacitance. The dark current is below 4 nA. The responsivity is 0.74 A/W at 1550 nm and 0.93 A/W at 1310 nm wavelength. 56 Gbps on-off-keying data reception is demonstrated with clear open eye diagrams in both the Cband and O-band. (C) 2016 Optical Society of America
引用
收藏
页码:4622 / 4631
页数:10
相关论文
共 17 条
[1]   High-Responsivity Low-Voltage 28-Gb/s Ge p-i-n Photodetector With Silicon Contacts [J].
Chen, Hong Tao ;
Verheyen, Peter ;
De Heyn, Peter ;
Lepage, Guy ;
De Coster, Jeroen ;
Absil, Philippe ;
Roelkens, Gunther ;
Van Campenhout, Joris .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2015, 33 (04) :820-824
[2]   Fabrication-Tolerant Four-Channel Wavelength-Division-Multiplexing Filter Based on Collectively Tuned Si Microrings [J].
De Heyn, Peter ;
De Coster, Jeroen ;
Verheyen, Peter ;
Lepage, Guy ;
Pantouvaki, Marianna ;
Absil, Philippe ;
Bogaerts, Wim ;
Van Campenhout, Joris ;
Van Thourhout, Dries .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2013, 31 (16) :2785-2792
[3]   Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current [J].
DeRose, Christopher T. ;
Trotter, Douglas C. ;
Zortman, William A. ;
Starbuck, Andrew L. ;
Fisher, Moz ;
Watts, Michael R. ;
Davids, Paul S. .
OPTICS EXPRESS, 2011, 19 (25) :24897-24904
[4]   High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide [J].
Feng, Dazeng ;
Liao, Shirong ;
Dong, Po ;
Feng, Ning-Ning ;
Liang, Hong ;
Zheng, Dawei ;
Kung, Cheng-Chih ;
Fong, Joan ;
Shafiiha, Roshanak ;
Cunningham, Jack ;
Krishnamoorthy, Ashok V. ;
Asghari, Mehdi .
APPLIED PHYSICS LETTERS, 2009, 95 (26)
[5]   Germanium wrap-around photodetectors on Silicon photonics [J].
Going, Ryan ;
Seok, Tae Joon ;
Loo, Jodi ;
Hsu, Kyle ;
Wu, Ming C. .
OPTICS EXPRESS, 2015, 23 (09) :11975-11984
[6]  
Li Guoliang, 2012, Opt Express, V20, P26345, DOI 10.1364/OE.20.026345
[7]   36 GHz submicron silicon waveguide germanium photodetector [J].
Liao, Shirong ;
Feng, Ning-Ning ;
Feng, Dazeng ;
Dong, Po ;
Shafiiha, Roshanak ;
Kung, Cheng-Chih ;
Liang, Hong ;
Qian, Wei ;
Liu, Yong ;
Fong, Joan ;
Cunningham, John E. ;
Luo, Ying ;
Asghari, Mehdi .
OPTICS EXPRESS, 2011, 19 (11) :10967-10972
[8]  
Liow T.-Y., 2014, OPT FIB COMM C
[9]   High bandwidth, high responsivity waveguide-coupled germanium p-i-n photodiode [J].
Lischke, Stefan ;
Knoll, Dieter ;
Mai, Christian ;
Zimmermann, Lars ;
Peczek, Anna ;
Kroh, Marcel ;
Trusch, Andreas ;
Krune, Edgar ;
Voigt, Karsten ;
Mai, A. .
OPTICS EXPRESS, 2015, 23 (21) :27213-27220
[10]   Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si [J].
Liu, Jifeng ;
Sun, Xiaochen ;
Pan, Dong ;
Wang, Xiaoxin ;
Kimerling, Lionel C. ;
Koch, Thomas L. ;
Michel, Jurgen .
OPTICS EXPRESS, 2007, 15 (18) :11272-11277