Rapid-Response, Low Detection Limit, and High-Sensitivity Capacitive Flexible Tactile Sensor Based on Three-Dimensional Porous Dielectric Layer for Wearable Electronic Skin

被引:208
|
作者
Qiu, Jie [1 ]
Guo, Xiaohui [1 ]
Chu, Ran [1 ]
Wang, Siliang [1 ]
Zeng, Wei [1 ]
Qu, Lei [1 ]
Zhao, Yunong [2 ]
Yan, Feng [3 ]
Xing, Guozhong [4 ]
机构
[1] Anhui Univ, Key Lab Intelligent Comp & Signal Proc, Sch Elect & Informat Engn, Minist Educ, 111 Jiulong Rd, Hefei 230601, Anhui, Peoples R China
[2] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, 1037 Luoyu Rd, Wuhan 430074, Hubei, Peoples R China
[3] Univ Alabama, Dept Met & Mat Engn, Tuscaloosa, AL 35487 USA
[4] Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China
基金
中国国家自然科学基金;
关键词
electronic skin; capacitive flexible tactile sensor; rapid response; low detection limit; high sensitivity; porous dielectric layer; conductive sponge; synergy effect; PRESSURE SENSORS; PIEZORESISTIVE SENSOR; CARBON NANOTUBES; STRAIN SENSORS; SPONGE; COMPOSITES; NANOCOMPOSITES; PERFORMANCE; DISPERSION; STABILITY;
D O I
10.1021/acsami.9b16511
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Three-dimensional (3D) porous conductive composites explored in highly sensitive tactile sensors have attracted extensive close attention in recent years owing to their peculiar porous structure and unique physical properties in terms of excellent mechanical flexibility, high relative dielectric permittivity, and good elastic property. Herein, we report an practical, efficient, and macroscopic dip-coating process to manufacture rapid-response, low detection limit, high-sensitivity, and highly sensitive capacitive flexible tactile sensors. The fabrication process, tactile perception mechanism, and sensing performance of the developed devices are comparatively investigated. The homogeneous 3D hybrid network constructed by graphene nanoplatelets/carboxyl-functionalized multiwalled carbon nanotubes/silicone rubber composites anchored on polyurethane sponge skeletons exhibits a significantly improved dielectric property, resulting in a high-performance capacitive flexible tactile sensor with a fast response time (similar to 45 ms), an extremely low-pressure detection limit of similar to 3 Pa, excellent sensitivity (similar to 0.062 kPa(-1)), and excellent durability and stability over 2000 cycles. Importantly, the flexible devices can be used as the wearable electronic skin and successfully mounted on human skin or a soft-bodied robot to achieve the capability of physiological stimuli monitoring, micropressure monitoring, soft grabbing, etc. Our rapid-response, low detection limit, and high-sensitivity capacitive flexible tactile sensor with a novel 3D porous dielectric layer could be a prospective candidate for the wearable applications in real-time and high-accuracy portable healthcare monitoring devices, advanced human-machine interfaces, and intelligent robot perception systems.
引用
收藏
页码:40716 / 40725
页数:10
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