Principle of direct van der Waals epitaxy of single-crystalline films on epitaxial graphene

被引:353
作者
Kim, Jeehwan [1 ]
Bayram, Can [1 ]
Park, Hongsik [1 ]
Cheng, Cheng-Wei [1 ]
Dimitrakopoulos, Christos [1 ]
Ott, John A. [1 ]
Reuter, Kathleen B. [1 ]
Bedell, Stephen W. [1 ]
Sadana, Devendra K. [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
LASER LIFT-OFF; GALLIUM NITRIDE; LAYERS; GAN; GROWTH; MICROSTRUCTURE; SEMICONDUCTORS; DEVICES;
D O I
10.1038/ncomms5836
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
There are numerous studies on the growth of planar films on sp(2)-bonded two-dimensional (2D) layered materials. However, it has been challenging to grow single-crystalline films on 2D materials due to the extremely low surface energy. Recently, buffer-assisted growth of crystalline films on 2D layered materials has been introduced, but the crystalline quality is not comparable with the films grown on sp(3)-bonded three-dimensional materials. Here we demonstrate direct van der Waals epitaxy of high-quality single-crystalline GaN films on epitaxial graphene with low defectivity and surface roughness comparable with that grown on conventional SiC or sapphire substrates. The GaN film is released and transferred onto arbitrary substrates. The post-released graphene/SiC substrate is reused for multiple growth and transfer cycles of GaN films. We demonstrate fully functional blue light-emitting diodes (LEDs) by growing LED stacks on reused graphene/SiC substrates followed by transfer onto plastic tapes.
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页数:7
相关论文
共 30 条
[1]   Graphene: synthesis and applications [J].
Avouris, Phaedon ;
Dimitrakopoulos, Christos .
MATERIALS TODAY, 2012, 15 (03) :86-97
[2]   AlN/GaN double-barrier resonant tunneling diodes grown by metal-organic chemical vapor deposition [J].
Bayram, C. ;
Vashaei, Z. ;
Razeghi, M. .
APPLIED PHYSICS LETTERS, 2010, 96 (04)
[3]   Kerf-Less Removal of Si, Ge, and III-V Layers by Controlled Spalling to Enable Low-Cost PV Technologies [J].
Bedell, Stephen W. ;
Shahrjerdi, Davood ;
Hekmatshoar, Bahman ;
Fogel, Keith ;
Lauro, Paul A. ;
Ott, John A. ;
Sosa, Norma ;
Sadana, Devendra .
IEEE JOURNAL OF PHOTOVOLTAICS, 2012, 2 (02) :141-147
[4]   Progress, Challenges, and Opportunities in Two-Dimensional Materials Beyond Graphene [J].
Butler, Sheneve Z. ;
Hollen, Shawna M. ;
Cao, Linyou ;
Cui, Yi ;
Gupta, Jay A. ;
Gutierrez, Humberto R. ;
Heinz, Tony F. ;
Hong, Seung Sae ;
Huang, Jiaxing ;
Ismach, Ariel F. ;
Johnston-Halperin, Ezekiel ;
Kuno, Masaru ;
Plashnitsa, Vladimir V. ;
Robinson, Richard D. ;
Ruoff, Rodney S. ;
Salahuddin, Sayeef ;
Shan, Jie ;
Shi, Li ;
Spencer, Michael G. ;
Terrones, Mauricio ;
Windl, Wolfgang ;
Goldberger, Joshua E. .
ACS NANO, 2013, 7 (04) :2898-2926
[5]   Microstructure of heteroepitaxial GaN revealed by x-ray diffraction [J].
Chierchia, R ;
Böttcher, T ;
Heinke, H ;
Einfeldt, S ;
Figge, S ;
Hommel, D .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (11) :8918-8925
[6]   Study of GaN light-emitting diodes fabricated by laser lift-off technique [J].
Chu, CF ;
Lai, FI ;
Chu, JT ;
Yu, CC ;
Lin, CF ;
Kuo, HC ;
Wang, SC .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (08) :3916-3922
[7]   High-quality GaN films grown on chemical vapor-deposited graphene films [J].
Chung, Kunook ;
Park, Suk In ;
Baek, Hyeonjun ;
Chung, Jin-Seok ;
Yi, Gyu-Chul .
NPG ASIA MATERIALS, 2012, 4 :e24-e24
[8]   Transferable GaN Layers Grown on ZnO-Coated Graphene Layers for Optoelectronic Devices [J].
Chung, Kunook ;
Lee, Chul-Ho ;
Yi, Gyu-Chul .
SCIENCE, 2010, 330 (6004) :655-657
[9]  
Emtsev KV, 2009, NAT MATER, V8, P203, DOI [10.1038/nmat2382, 10.1038/NMAT2382]
[10]   Van der Waals heterostructures [J].
Geim, A. K. ;
Grigorieva, I. V. .
NATURE, 2013, 499 (7459) :419-425