Fabrication of Mg2Sn(111) film by molecular beam epitaxy

被引:10
作者
Aizawa, Takashi [1 ,2 ]
Ohkubo, Isao [1 ,2 ]
Lima, Mariana S. L. [1 ,2 ,3 ]
Sakurai, Takeaki [3 ]
Mori, Takao [1 ,2 ]
机构
[1] Natl Inst Mat Sci, MANA, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[2] Natl Inst Mat Sci, CFNS, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[3] Univ Tsukuba, Inst Appl Phys, 1-1-1 Tennodai, Tsukuba, Ibaraki 3058577, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2019年 / 37卷 / 06期
关键词
THIN-FILMS; MG2SI FILMS; GROWTH; GE; SN;
D O I
10.1116/1.5122844
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Magnesium stannide (Mg2Sn) is a small bandgap semiconductor of interest as a promising thermoelectric or optoelectronic material. Thin films of Mg2Sn were epitaxially grown on sapphire (0001) surfaces using molecular beam epitaxy. The epitaxial relationship is (111)(Mg2Sn) parallel to (0001)(Al2O3) and [11 (2) over bar](Mg2Sn) parallel to [10 (1) over bar0](Al2O3), with a small amount of stacking faults. A relatively high growth rate of 0.21-0.27 nm/s was attainable. (C) 2019 Author(s).
引用
收藏
页数:5
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