Probing anchor losses in AlN-on-Si contour mode MEMS resonators through laser Doppler vibrometry

被引：0

作者：

Tu, Cheng ^{[1
]}

Lee, Joshua E-Y ^{[1
]}

Frank, Astrid ^{[2
]}

Schaeffel, Christoph ^{[2
]}

Stehr, Uwe ^{[3
]}

Hein, Matthias ^{[3
]}

机构：

[1] City Univ Hong Kong, Dept Elect Engn, Kowloon, Hong Kong, Peoples R China

[2] Inst Mikroelekt & Mech Syst Gemeinnutzige GmbH, Ilmenau, Germany

[3] Tech Univ Ilmenau, IMN MacroNano, Ilmenau, Germany

来源：

2016 IEEE SENSORS | 2016年

关键词：

MEMS resonators; contour mode; Piezoelectric-onsubstrate; anchor loss; laser Doppler vibrometry;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the novel application of high frequency laser Doppler vibrometry to measure the underlying mechanism leading to anchor loss that now limits the quality factor of low impedance contour mode aluminum nitride (AlN) on silicon resonators. We applied the technique to two resonators designed to have largely different quality factors (2100 vs. 12000) in order to correlate the findings from laser vibrometer measurements to anchor loss. We show that the vibrometer measurements are in close harmony with findings from finite element analysis. These results allow us to move beyond pure simulations in the course of analyzing anchor losses in AlN- on- Si contour mode resonators.

引用

页数：3

共 9 条

[1] Chih-Ming Lin, 2011, TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, P1512, DOI 10.1109/TRANSDUCERS.2011.5969687
[2] In-plane acoustic reflectors for reducing effective anchor loss in lateral-extensional MEMS resonators
Harrington, B. P.
Abdolvand, R.
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (08)
[3] Thin-Film Piezoelectric-on-Silicon Particle Mass Sensors
Harrington, Brandon P.
Abdolvand, Reza
Hajjam, Arash
Wilson, James C.
Pourkamali, Siavash
[J]. 2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, : 238 - 241
[4] Pan W., 2010, IEEE MEMS 2010, P104
[5] Viscous and acoustic losses in length-extensional microplate resonators in liquid media
Ruiz-Diez, Victor
Hernando-Garcia, Jorge
Manzaneque, Tomas
Kucera, Martin
Schmid, Ulrich
Luis Sanchez-Rojas, Jose
[J]. APPLIED PHYSICS LETTERS, 2015, 106 (08)
[6] Anchor Losses in AlN Contour Mode Resonators
Segovia-Fernandez, Jeronimo
Cremonesi, Massimiliano
Cassella, Cristian
Frangi, Attilio
Piazza, Gianluca
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2015, 24 (02) : 265 - 275
[7] VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes
Tu, Cheng
Lee, Joshua E-Y
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (06)
[8] A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators
Tu, Cheng
Lee, Joshua E-Y
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (11)
[9] Zhu HS, 2016, PROC IEEE MICR ELECT, P970, DOI 10.1109/MEMSYS.2016.7421794

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