Polarized Raman Spectroscopy and Chemometric Analysis of Micro-crystalline Silicon for Solar Cells

被引:0
|
作者
Adley, David [1 ]
Perova, Tatiana S. [1 ,2 ]
Monaghan, Eamonn [3 ]
Ellingboe, A. R. [3 ]
机构
[1] Trinity Coll Dublin, Dept Elect & Elect Engn, Dublin, Ireland
[2] ITMO Univ, St Petersburg, Russia
[3] Dublin City Univ, Sch Phys Sci, Dublin 9, Ireland
来源
2015 3RD ASIA CONFERENCE ON MECHANICAL AND MATERIALS ENGINEERING (ACMME 2015) | 2015年 / 26卷
关键词
LARGE-AREA; DEPOSITION; FILMS;
D O I
10.1051/matecconf/20152601011
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Micro-crystalline silicon (mu c-Si: H) is currently under extensive investigation due to it's applications in solar cells. The crystalline content and structural properties of mu c-Si: H can be determined from several characterisation techniques such as high-resolution transmission electron microscopy (HRTEM), X-Ray diffraction (XRD), spectroscopic ellipsometry (SE) and Raman spectroscopy. In this paper a solution is proposed to reduce the effect of second order phonons on the Raman spectra of mu c-Si: H for evaluation of crystalline volume fraction chi(c).
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页数:4
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