Position Measurement of Laser Center by Using 2-D PSD and Fixed-Axis Rotating Device

被引:7
作者
Zhang, Pengcheng [1 ]
Liu, Jin [1 ]
Yang, Haima [2 ]
Yu, Luo [1 ]
机构
[1] Shanghai Univ Engn Sci, Sch Elect & Elect Engn, Shanghai 201620, Peoples R China
[2] Univ Shanghai Sci & Technol, Sch Opt Elect & Comp Engn, Shanghai 200093, Peoples R China
基金
中国国家自然科学基金; 上海市自然科学基金;
关键词
Measurement by laser beam; Semiconductor lasers; Optical variables measurement; Position measurement; Semiconductor device measurement; Gravity; Position sensitive detector; rotating laser; curve surface fitting; laser center location; SENSITIVE DETECTOR; NEURAL-NETWORK; LINEARITY;
D O I
10.1109/ACCESS.2019.2943910
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Photoelectric non-contact measurement methods have been widely implemented in space target location, micro-displacement measurement and space optical communication. In term of the reliability and precision of measurement systems, it is a great significance to obtain the laser center location accurately. Since the two-dimensional position sensitive detector (2-D PSD) can continuously detects the gravity center position of the laser spot on its photosensitive surface, this paper provides a flexible method with high precision for the nonlinear correction of PSD as well as a new idea for PSD-based moving laser center positioning. Above all, a laser device system that rotating around a fixed-axis is designed, and the rotation angle can be controlled with the rotation accuracy of 0.5. The trace of the gravity center of the rotating spot generated by the device on the PSD surface is detected, and then the laser center location is obtained after further processing of data. In order to improve the detection accuracy of PSD, this research mainly focuses on the nonlinear correction method of the detector and the fitting method of the gravity center trace of the laser spot. Moreover, the effects of different sizes of light spots projected onto the 2-D PSD on the collected photocurrent and estimated coordinates were analyzed by experiments. From the experimental results, the non-linear error of PSD is corrected by the error curved surface interpolation method, the overall error is reduced by more than 32, and the linearity of the positioning of the laser moving along the diagonal of PSD is 0.2.
引用
收藏
页码:140319 / 140327
页数:9
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