Ablation plume movement in a pulsed laser deposition system

被引：0

作者：

Marcu, A ^{[1
]}

Grigoriu, C ^{[1
]}

Cristea, V ^{[1
]}

Yatsui, K ^{[1
]}

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Laser Dept, Bucharest, Romania

来源：

ROMOPTO 2003: SEVENTH CONFERENCE ON OPTICS | 2004年 / 5581卷

关键词：

laser ablation; pulsed laser deposition; thin film; YBCO; droplets; plume expansion; plasma simulation;

D O I：

10.1117/12.582833

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel three-dimensional model has been proposed for simulating pulsed laser ablation plume behavior and `micron-sized particles' movement. It describes the plume expansion in vacuum or into an environmental gas. The model combined the advantages of Monte-Carlo and Finite Element methods, being able to give a detailed image of particles behavior, both from microscopic and macroscopic points of view. The particle interaction with obstacles is aimed to provide us a more comprehensive understanding of Pulsed Laser Deposition (PLD) techniques, with the final objective of obtaining droplets-free surfaces.

引用

页码：371 / 377

页数：7

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