POLARIZATION SWITCHING ANTENNA INTEGRATED WITH RF MEMS SWITCHES USING SILICON-ON-QUARTZ AND BCB PACKAGING PLATFORM

被引：0
|
作者：
Hyeon, Ik-Jae [1 ]
Chung, Jinwoo [1 ]
Lim, Sungjoon [1 ]
Kim, Jong-Man [2 ]
Baek, Chang-Wook [1 ]
机构：
[1] Chung Ang Univ, Seoul, South Korea
[2] Pusan Natl Univ, Busan, South Korea
来源：
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a polarization switching antenna integrated with RF MEMS switches based on the novel packaging platform using silicon-on-quartz (SoQ) substrate and BCB(benzocyclobutene) bonding technique. By using the SoQ wafer as an antenna substrate as well as for a packaging lid, fabrication complexity and degradation of RF performances of the antenna due to the parasitic effects coming from the packaging method can be reduced. A fully-packaged K-band antenna capable of switching between two linear polarization states by actuating integrated silicon MEMS switches has been successfully fabricated. Performances of the antenna have been simulated and experimentally evaluated.
引用
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页码：755 / 758
页数：4
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