Low temperature growth of carbon nanotubes - A review

被引:103
作者
Ahmad, Muhammad [1 ]
Silva, S. Ravi P. [1 ,2 ]
机构
[1] Univ Surrey, Adv Technol Inst, Guildford GU2 7XH, Surrey, England
[2] Univ Surrey, Dept Elect & Elect Engn, Guildford GU2 7XH, Surrey, England
基金
英国工程与自然科学研究理事会;
关键词
CHEMICAL-VAPOR-DEPOSITION; LOW SUBSTRATE-TEMPERATURE; SINGLE-WALLED NANOTUBES; LARGE-SCALE; ELECTRICAL CHARACTERIZATION; CATALYST NANOPARTICLES; PATTERNED GROWTH; DEPENDENT GROWTH; INTERCONNECTS; MECHANISM;
D O I
10.1016/j.carbon.2019.11.061
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Carbon nanotubes (CNTs) have gained much interest from academia and industry due to their unique properties that include high electrical and thermal conductivity, high mechanical strength, high aspect ratio, high surface area and chemical resistance. Although composite structures containing CNTs are probably the most commercially advanced applications in the market, the area that holds most promise is in electronic applications. Low temperature CVD growth of high quality CNTs can be utilized in many applications particularly next generation IoTs, wearable electronic devices, TSVs, interconnects, and sensors. CNT growth temperature generally reported in literature ranges from 600 to 1000 degrees C, which is not suitable for temperature sensitive substrates. However, there is ongoing research to achieve CNT growth at low temperatures, with a number reporting the growth below 550 degrees C. In this review, we examine and discuss various techniques and approaches adopted to achieve growth of carbon nanotubes at low temperatures and its effect on various parameters of CNTs. (C) 2019 Elsevier Ltd. All rights reserved.
引用
收藏
页码:24 / 44
页数:21
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