Carbon nanotubes (CNTs) have gained much interest from academia and industry due to their unique properties that include high electrical and thermal conductivity, high mechanical strength, high aspect ratio, high surface area and chemical resistance. Although composite structures containing CNTs are probably the most commercially advanced applications in the market, the area that holds most promise is in electronic applications. Low temperature CVD growth of high quality CNTs can be utilized in many applications particularly next generation IoTs, wearable electronic devices, TSVs, interconnects, and sensors. CNT growth temperature generally reported in literature ranges from 600 to 1000 degrees C, which is not suitable for temperature sensitive substrates. However, there is ongoing research to achieve CNT growth at low temperatures, with a number reporting the growth below 550 degrees C. In this review, we examine and discuss various techniques and approaches adopted to achieve growth of carbon nanotubes at low temperatures and its effect on various parameters of CNTs. (C) 2019 Elsevier Ltd. All rights reserved.