Use of High Repetition Rate and High Power Lasers in Microfabrication: How to Keep the Efficiency High?

被引：178

作者：

Raciukaitis, Gediminas ^{[1
]}

Brikas, Marijus ^{[1
]}

Gecys, Paulius ^{[1
]}

Voisiat, Bogdan ^{[1
]}

Gedvilas, Mindaugas ^{[1
]}

机构：

[1] Inst Phys, Appl Res Lab, LT-02300 Vilnius, Lithuania

来源：

JOURNAL OF LASER MICRO NANOENGINEERING | 2009年 / 4卷 / 03期

关键词：

ablation threshold; accumulation effects; ablation rate; picosecond laser; metals; ABLATION; METALS; PULSES; DAMAGE; AIR;

D O I：

10.2961/jlmn.2009.03.0008

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Effects related to the use of high power and repetition rate lasers in ablation of metals and silicon were investigated. Numeric simulation and experiments were performed to find out conditions of the efficient use of laser energy. Accumulation of defects lowers the ablation threshold when a high pulse-repetition rate is applied. An optimum beam waist exists for certain pulse energy to maximize the ablation but the waist does not allow achieving a high processing accuracy. Energy efficiency of the laser processing falls down when pulse energy exceeds the material dependant limit. Plasma shielding was assumed to be the main limiting factor in processing efficiency of metals with the high power picosecond lasers. Intelligent control of process parameters is required to keep optimal conditions for the material removal by laser ablation.

引用

页码：186 / 191

页数：6

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