Optical properties of nanocrystalline La2O3 dielectric films deposited by radio frequency magnetron sputtering

被引：7

作者：

Brachetti-Sibaja, S. B. ^{[1
,2
]}

Rodil, S. E. ^{[3
]}

Dominguez-Crespo, M. A. ^{[1
]}

Torres-Huerta, A. M. ^{[1
]}

Rodriguez, E. ^{[1
]}

Lopez-Oyama, A. B. ^{[4
]}

机构：

[1] Inst Politecn Nacl, CICATA Altamira, Km 14-5 Carretera Tampico Puerto Ind Altamira, Altamira 89600, Tamaulipas, Mexico

[2] Inst Tecnol Cd Madero, TecNM, Ave Primero de Mayo S-N, Cd Madero 89440, Tam, Mexico

[3] Univ Nacl Autonoma Mexico, IIM, Circuito Exterior S-N CU, Coyoacan 04510, DF, Mexico

[4] Inst Politecn Nacl, Conacyt, CICATA, Unidad Altamira, Km 14-5 Carr Tampico Puerto, Altamira 89600, Tamps, Mexico

来源：

THIN SOLID FILMS | 2017年 / 636卷

关键词：

Optical properties; Sputtering; Thin films; Lanthanum oxide; Lanthanum hydroxide; Swanepoel method; LANTHANUM OXIDE-FILMS; THIN-FILMS; CORE LEVELS; GROWTH; LA;

D O I：

10.1016/j.tsf.2017.07.010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

La2O3 thin films were successfully synthesized by r.f. magnetron sputtering technique. The effect of power, deposition time and substrate temperature on the formation and optical properties of the films was investigated. X-ray diffraction (XRD) studies revealed the formation of hexagonal phased La2O3 thin films. The influence of sputtering parameters on chemical composition and surface species was studied by X-ray photoelectron spectroscopy (XPS). The optical properties were investigated in the wavelength range of 200-1100 nm. The samples were modelled as a three-phase optical model. Optical constants were calculated at 2eV from classical dispersion model based on the single Lorentz for dielectric materials. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：615 / 621

页数：7

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