Microwave dielectric properties of magnesium calcium titanate thin films

被引：32
|
作者：
Lee, BD
Lee, HR
Yoon, KH [1 ]
Cho, YS
机构：
[1] Yonsei Univ, Dept Ceram Engn, Seoul 120749, South Korea
[2] EI Pont Nemours & Co Inc, Res Triangle Pk, NC 27709 USA
来源：
CERAMICS INTERNATIONAL | 2005年 / 31卷 / 01期
关键词：
CT; MT; MCT; film; microwave; dielectric constants; dielectric loss; temperature coefficient of dielectric constant;
D O I：
10.1016/j.ceramint.2004.04.001
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The microwave dielectric properties of CaTiO3 (CT), MgTiO3 (MT) and (Mg0.93Ca0.07)TiO3 (MCT) thin films prepared by the metalorganic solution deposition technique were investigated. The well-crystallized CT, NIT and MCT thin films were annealed at 800degreesC. The microwave dielectric properties of the thin films were measured using a circular-patch capacitor geometry with a network analyzer. The dielectric constant (K), dielectric loss (tan delta) and temperature coefficient of dielectric constant (TCK) of CT films measured up to 6 GHz were 160 +/- 3, 0.003 +/- 0.0003 and - 1340 ppm/degreesC, respectively. In contrast, the MT films showed K similar to 16 +/- 1, tan delta similar to 0.0008 +/- 0.0001 and TCK similar to +260 ppm/degreesC. MCT films exhibited microwave dielectric properties of K similar to 22 +/- 1, tan delta - 0.0012 +/- 0002 and TCK similar to +10 ppm/degreesC. (C) 2004 Elsevier Ltd and Techna S.r.l. All rights reserved.
引用
收藏
页码：143 / 146
页数：4
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