Pyrolytic 3D Carbon Microelectrodes for Electrochemistry

被引：11

作者：

Hemanth, S. ^{[1
]}

Caviglia, C. ^{[1
]}

Amato, L. ^{[1
]}

Anhoj, T. A. ^{[2
]}

Heiskanen, A. ^{[1
]}

Emneus, J. ^{[1
]}

Keller, S. S. ^{[1
]}

机构：

[1] DTU Nanotech, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

[2] DTU Danchip, DK-2800 Lyngby, Denmark

来源：

ENGINEERING CARBON HYBRIDS - CARBON ELECTRONICS 2 | 2016年 / 72卷 / 01期

关键词：

HIGH-ASPECT-RATIO; SU-8; ELECTRODE; ARRAYS; LITHOGRAPHY; FABRICATION; MEMS;

D O I：

10.1149/07201.0117ecst

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

This work presents the fabrication and characterization of suspended three-dimensional (3D) pyrolytic carbon microelectrodes for electrochemical applications. For this purpose, an optimized process with multiple steps of UV photolithography with the negative tone photoresist SU-8 followed by pyrolysis at 900 degrees C for 1h was developed. With this process, microelectrode chips with a three electrode configuration were fabricated and characterized with cyclic voltammetry (CV) using a 10mM potassium ferri-ferrocyanide redox probe in a custom made batch system with magnetic clamping. The 3D pyrolytic carbon microelectrodes displayed twice the higher peak current compared to 2D.

引用

页码：117 / 124

页数：8

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