Pyrolytic 3D Carbon Microelectrodes for Electrochemistry

被引：11
|
作者：
Hemanth, S. [1 ]
Caviglia, C. [1 ]
Amato, L. [1 ]
Anhoj, T. A. [2 ]
Heiskanen, A. [1 ]
Emneus, J. [1 ]
Keller, S. S. [1 ]
机构：
[1] DTU Nanotech, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark
[2] DTU Danchip, DK-2800 Lyngby, Denmark
来源：
ENGINEERING CARBON HYBRIDS - CARBON ELECTRONICS 2 | 2016年 / 72卷 / 01期
关键词：
HIGH-ASPECT-RATIO; SU-8; ELECTRODE; ARRAYS; LITHOGRAPHY; FABRICATION; MEMS;
D O I：
10.1149/07201.0117ecst
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
This work presents the fabrication and characterization of suspended three-dimensional (3D) pyrolytic carbon microelectrodes for electrochemical applications. For this purpose, an optimized process with multiple steps of UV photolithography with the negative tone photoresist SU-8 followed by pyrolysis at 900 degrees C for 1h was developed. With this process, microelectrode chips with a three electrode configuration were fabricated and characterized with cyclic voltammetry (CV) using a 10mM potassium ferri-ferrocyanide redox probe in a custom made batch system with magnetic clamping. The 3D pyrolytic carbon microelectrodes displayed twice the higher peak current compared to 2D.
引用
收藏
页码：117 / 124
页数：8
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