Electronic structure of xenon implanted with low energy in amorphous silicon

被引:4
|
作者
Barbieri, P. F. [1 ]
Landers, R. [1 ]
de Oliveira, M. H., Jr. [1 ]
Alvarez, F. [1 ]
Marques, F. C. [1 ]
机构
[1] Univ Estadual Campinas, Inst Fis Gleb Wataghin, GPF, DFA,IFGW, BR-13083970 Campinas, SP, Brazil
基金
巴西圣保罗研究基金会;
关键词
binding energy; xenon; relaxation; trapping; assisted deposition; voids;
D O I
10.1016/j.elspec.2006.12.064
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Electronic struture of Xe implanted in amorphous silicon (a-Si) films are investigated. Xe atoms were implanted with low energy by ion beam assisted deposition (IBAD) technique during growth of the a-Si films. The Xe implantation energy varied in the 0-300eV energy range. X-ray photoelectron spectroscopy (XPS), X-ray Auger excited spectroscopy (XAES) and X-ray absorption spectroscopy (XAS) were used for investigating the Xe electronic structure. The Xe M4N45N45 transitions were measured to extract the Auger parameter and to analyze the initial state and relaxation contributions. It was found that the binding energy variation is mainly due to initial state contribution. The relaxation energy variation also shows that the Xe trapped environment depends on the implantation energy. XAS measurements reveals that Xe atoms are dispersed in the a-Si matrix. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:409 / 412
页数:4
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