Controllable Set Voltage in Bilayer ZnO:SiO2/ZnOx Resistance Random Access Memory by Oxygen Concentration Gradient Manipulation

被引:13
作者
Huang, Xuan [1 ]
Chang, Kuan-Chang [2 ]
Chang, Ting-Chang [3 ]
Tsai, Tsung-Ming [2 ]
Shih, Chih-Cheng [2 ]
Zhang, Rui [4 ]
Huang, Syuan-Yong [2 ]
Chen, Kai-Huang [5 ]
Chen, Jung-Hui [6 ]
Wang, Huei-Jruan [2 ]
Chen, Wen-Jen [7 ]
Zhang, Fengyan [1 ]
Chen, Chao [1 ]
Sze, Simon M. [3 ]
机构
[1] Xiamen Univ, Sch Energy Res, Xiamen 361000, Peoples R China
[2] Natl Sun Yat Sen Univ, Dept Mat & Optoelect Sci, Kaohsiung 804, Taiwan
[3] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[4] Peking Univ, Sch Software & Microelect, Beijing 100871, Peoples R China
[5] Tung Fang Design Univ, Dept Elect Engn & Comp Sci, Kaohsiung 829, Taiwan
[6] Natl Kaohsiung Normal Univ, Dept Chem, Kaohsiung 80201, Taiwan
[7] Univ Texas Austin, Austin, TX 78705 USA
关键词
RRAM; set voltage; zinc oxide; concentration gradient; OXIDE; ELECTRODE;
D O I
10.1109/LED.2014.2360525
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this letter, we investigated oxygen ion concentration gradient method, which can manipulate the set voltage of zinc oxide-doped silicon oxide resistance random access memory. To analyze this method, the ITO/ZnO:SiO2/ZnOx/TiN bilayer structure was proposed and discussed. On the basis of the oxygen ions migration effect, the set voltage of the oxide-based resistive memory can be altered after a bias stress at the TiN electrode. The physical mechanism of the special resistive switching characteristics were depicted by the interaction between [O-2(-)] gradient driving force and electrical force.
引用
收藏
页码:1227 / 1229
页数:3
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