共 10 条
[2]
CHIKARMANE V, 1992, MATER RES SOC S P, V243, P367
[3]
Formation of a lead zirconate titanate (PZT)/Pt interfacial layer and structural changes in the Pt/Ti/SiO2/Si substrate during the deposition of PZT thin film by electron cyclotron resonance plasma-enhanced chemical vapor deposition
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1997, 36 (7A)
:4386-4391
[9]
SHKLOVSKII BI, 1984, ELECT PROPERTIES DOP, P321