Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film

被引:24
作者
Elhadj, S [1 ]
Woody, JW [1 ]
Niu, VS [1 ]
Saraf, RF [1 ]
机构
[1] Virginia Polytech Inst & State Univ, Dept Chem Engn, Blacksburg, VA 24061 USA
关键词
D O I
10.1063/1.1543253
中图分类号
O59 [应用物理学];
学科分类号
摘要
The possibility of using self-assembled films of block polymers as templates to fabricate nanoscale structures for devices has attracted great attention towards this class of material. Self-assembly of a block copolymer can be directed by using an electric field to orient features (i.e., similar to10-nm-diam cylinders) parallel to the electric field, making the material more attractive as a nanoscale lithography mask. In this letter we describe an approach to influence the electric field orientation phenomena by interfacial effects. As a result, the 15-nm-diam polystyrene cylinders of the polystyrene-polyisoprene-polystyrene triblock copolymer orient perpendicular to the electric field. The described approach along with the previous method can produce a directed self-assembly to fabricate complex nanoscale structures with orthogonally oriented nanoscale width lines. (C) 2003 American Institute of Physics.
引用
收藏
页码:871 / 873
页数:3
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