A control method to reduce the standard deviation of flow time in wafer fabrication

被引：17

作者：

Yoon, HJ ^{[1
]}

Lee, DY ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2000年 / 13卷 / 03期

关键词：

flow time (cycle time); scheduling; stochastic petri nets (SPN); wafer fabrication;

D O I：

10.1109/66.857950

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper proposes a control method for reducing flow time variability in a wafer fabrication facility with multiple wafer types. We employ stochastic petri nets to model and analyze the machine module, and define operation due dates using a novel utilization index metric. An operation due date (OPNDD) rule for lot dispatch is proposed and evaluated against other tot dispatch policies.

引用

页码：389 / 392

页数：4

共 8 条

[1] PERFORMANCE EVALUATION OF AUTOMATED MANUFACTURING SYSTEMS USING GENERALIZED STOCHASTIC PETRI NETS [J].

ALJAAR, RY ;

DESROCHERS, AA .

IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, 1990, 6 (06) :621-639

[2]

CHUNG SH, 1997, IEEE T COMPON PACK T, V20, P278

[3] Due-date based scheduling and control policies in a multiproduct semiconductor wafer fabrication facility [J].

Kim, YD ;

Kim, JU ;

Lim, SK ;

Jun, HB .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1998, 11 (01) :155-164

[4] EFFICIENT SCHEDULING POLICIES TO REDUCE MEAN AND VARIANCE OF CYCLE-TIME IN SEMICONDUCTOR MANUFACTURING PLANTS [J].

LU, SCH ;

RAMASWAMY, D ;

KUMAR, PR .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1994, 7 (03) :374-388

[5]

MOLLOY MK, 1982, IEEE T COMPUT, V31, P913, DOI 10.1109/TC.1982.1676110

[6] CONWIP - A PULL ALTERNATIVE TO KANBAN [J].

SPEARMAN, ML ;

WOODRUFF, DL ;

HOPP, WJ .

INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, 1990, 28 (05) :879-894

[7] A REVIEW OF PRODUCTION PLANNING AND SCHEDULING MODELS IN THE SEMICONDUCTOR INDUSTRY PART I: SYSTEM CHARACTERISTICS, PERFORMANCE EVALUATION AND PRODUCTION PLANNING [J].

UZSOY, R ;

LEE, CY ;

MARTINVEGA, LA .

IIE TRANSACTIONS, 1992, 24 (04) :47-60

[8] SCHEDULING SEMICONDUCTOR WAFER FABRICATION [J].

WEIN, LM .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1988, 1 (03) :115-130

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