Optimum mode of operation for a low energy focused ion beam system

被引：5

作者：

Rauscher, M ^{[1
]}

Plies, E ^{[1
]}

机构：

[1] Univ Tubingen, Inst Phys Appl, D-72076 Tubingen, Germany

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 06期

关键词：

D O I：

10.1116/1.1809630

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The system design and mode of operation for a dedicated low energy focused ion beam system based on immersion optics is presented. The ion beam is accelerated using a gun lens and the intermediate lens space is set on high potential. Beam retarding to the landing energy is accomplished within the objective lens. With this design the target is field free and can be kept on ground potential. As all voltage levels are comparatively low, both gun as well as objective lens can be operated in accel mode, thus improving system performance. The influence of Coulomb interactions is also taken into account. Calculations predict a spot size of approximately 80 nm and a corresponding probe current density of I A/cm(2) at a working distance of 15 mm and a final beam energy of 3 keV, respectively. (C) 2004 American Vacuum Society.

引用

页码：3004 / 3007

页数：4

共 22 条

[1] OPTICAL-SYSTEM FOR A LOW-ENERGY FOCUSED ION-BEAM [J].

AIHARA, R ;

KASAHARA, H ;

SAWARAGI, H ;

SHEARER, MH ;

THOMPSON, WB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (01) :79-82

[2]

Barth JE, 1996, OPTIK, V101, P101

[3] LOW-VOLTAGE PROBE FORMING COLUMNS FOR ELECTRONS [J].

BECK, S ;

PLIES, E ;

SCHIEBEL, B .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1995, 363 (1-2) :31-42

[4] Theoretical and experimental investigations on Coulomb interactions in a two-lens focussed ion beam instrument [J].

Bi, J ;

Jiang, XR ;

Kruit, P .

MICROELECTRONIC ENGINEERING, 1997, 35 (1-4) :439-442

[5] Influence of Coulomb interactions on current density distribution in a two-lens focused ion beam system [J].

Bi, J ;

de Jager, PWH ;

Barth, JE ;

Kruit, P .

MICROELECTRONIC ENGINEERING, 1998, 42 :249-252

[6]

Burkhardt C, 2004, PRAKT METALLOGR-PR M, V41, P190

[7] BEAM INTERACTIONS IN A FOCUSED ION-BEAM SYSTEM WITH A LIQUID-METAL ION-SOURCE [J].

DEJAGER, PWH ;

VIJGEN, LJ .

MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) :107-110

[8]

DIDENKO L, 1992, NUCL INSTRUM METH A, V427, P121

[9] LOW-ENERGY ION-OPTICAL SYSTEM WITH A LIQUID-METAL ION-SOURCE FOR IMAGING AND PROCESSING SOLID STRUCTURES [J].

DRIESEL, W .

ULTRAMICROSCOPY, 1993, 52 (01) :65-72

[10]

GNAUCK P, 2000, THESIS U TUBINGEN

← 1 2 3 →